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The Physics of Submicron Lithography - Microdevices Kamil A. Valiev Softcover reprint of the original 1st ed. 1992 edition
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The Physics of Submicron Lithography - Microdevices
Kamil A. Valiev
In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.
493 pages, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2012. gada 27. septembris |
| ISBN13 | 9781461364610 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 493 |
| Izmēri | 178 × 254 × 26 mm · 870 g |
| Valoda | Angļu |
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