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The Physics of Submicron Lithography - Microdevices Kamil A. Valiev 1992 edition
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The Physics of Submicron Lithography - Microdevices
Kamil A. Valiev
In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer.
493 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1992. gada 31. marts |
| ISBN13 | 9780306435782 |
| Izdevēji | Springer Science+Business Media |
| Lapas | 493 |
| Izmēri | 178 × 254 × 25 mm · 1,09 kg |
| Valoda | Angļu |
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