A.j. Van Roosmalen
Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology A.j. Van Roosmalen Softcover reprint of the original 1st ed. 1991 edition

Name: Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology
Price: 152.99 EUR
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Author: A.j. Van Roosmalen

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Hardcover Book

1991 edition

(1991) € 152,99

Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology

A.j. Van Roosmalen

Softcover reprint of the original 1st ed. 1991 edition

This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.

256 pages, black & white illustrations

Mediji	Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru)
Izlaists	2013. gada 29. maijs
ISBN13	9781489925688
Izdevēji	Springer-Verlag New York Inc.
Lapas	237
Izmēri	178 × 254 × 13 mm · 449 g
Valoda	Angļu