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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology A.j. Van Roosmalen 1991 edition
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Dry Etching for VLSI - Updates in Applied Physics and Electrical Technology
A.j. Van Roosmalen
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
254 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1991. gada 31. marts |
| ISBN13 | 9780306438356 |
| Izdevēji | Springer Science+Business Media |
| Lapas | 237 |
| Izmēri | 178 × 254 × 19 mm · 666 g |
| Valoda | Angļu |
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