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Materials & Process Integration for MEMS - Microsystems Francis E H Tay Softcover reprint of hardcover 1st ed. 2002 edition
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Materials & Process Integration for MEMS - Microsystems
Francis E H Tay
Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures.
328 pages, 176 black & white illustrations, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2010. gada 3. decembris |
| ISBN13 | 9781441953032 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 299 |
| Izmēri | 155 × 235 × 17 mm · 458 g |
| Valoda | Angļu |
| Redaktors | Tay, Francis E. H. |
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