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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Jean Laconte 2006 edition
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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Jean Laconte
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.
292 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2006. gada 11. aprīlis |
| ISBN13 | 9780387288420 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 292 |
| Izmēri | 155 × 235 × 19 mm · 607 g |
| Valoda | Angļu |
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