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Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology Nava Setter 2005 edition
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Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology
Nava Setter
Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.
414 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2005. gada 3. marts |
| ISBN13 | 9780387233109 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 414 |
| Izmēri | 155 × 235 × 23 mm · 839 g |
| Redaktors | Setter, Nava |
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