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Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science Klaus Graff 2nd ed. 2000. Softcover reprint of the original 2n edition
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Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science
Klaus Graff
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. This new edition includes important recent data and many new tables.
270 pages, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2012. gada 21. oktobris |
| ISBN13 | 9783642629655 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 270 |
| Izmēri | 155 × 235 × 16 mm · 412 g |
| Valoda | Angļu |
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