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Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science Klaus Graff 2nd rev. edition
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Metal Impurities in Silicon-Device Fabrication - Springer Series in Materials Science
Klaus Graff
This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. This new edition includes important recent data and many new tables.
270 pages, XV, 270 p.
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2000. gada 18. februāris |
| ISBN13 | 9783540642138 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 270 |
| Izmēri | 155 × 235 × 238 mm · 521 g |
| Valoda | Angļu |
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