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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Takeshi Hattori Softcover reprint of hardcover 1st ed. 1998 edition
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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing
Takeshi Hattori
This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
648 pages, 345 black & white illustrations, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2010. gada 7. decembris |
| ISBN13 | 9783642082726 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 616 |
| Izmēri | 155 × 235 × 36 mm · 934 g |
| Valoda | Vācu |
| Tulks | Hattori, T. |
| Tulks | Heusler, S. |
| Tulks | Webb, J.P. |
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