Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures - Joachim Fruhauf - Grāmatas - Springer-Verlag Berlin and Heidelberg Gm - 9783642060489 - 2010. gada 13. oktobris
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Joachim Fruhauf
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures Softcover reprint of hardcover 1st ed. 2005 edition

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The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gärtner, Steffi Krönert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of Technology (Head: Prof. Thomas Gessner). The author and his coworkers wish to express their thanks to Wolfgang Bräuer (mask design), Norbert Zichner (processes), Iris Höbelt (SEM pictures) and the student Karin Preißler (manuscript layout support). In particular thanks are due to the Stiftung Industrieforschung for the financial support and to the Springer V- lag for the edition of this manual.

222 pages, biography

Mediji Grāmatas     Paperback Book   (Grāmata ar mīksto vāku un līmēto muguru)
Izlaists 2010. gada 13. oktobris
ISBN13 9783642060489
Izdevēji Springer-Verlag Berlin and Heidelberg Gm
Lapas 222
Izmēri 155 × 235 × 13 mm   ·   335 g
Valoda Angļu  

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