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Modelling of Microfabrication Systems - Microtechnology and MEMS Raja Nassar Softcover reprint of hardcover 1st ed. 2003 edition
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Modelling of Microfabrication Systems - Microtechnology and MEMS
Raja Nassar
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
279 pages, 4 black & white illustrations, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2010. gada 8. decembris |
| ISBN13 | 9783642055362 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 270 |
| Izmēri | 155 × 235 × 14 mm · 394 g |
| Valoda | Vācu |
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