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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Hattori 1998 edition
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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing
Hattori
This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
616 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1998. gada 17. septembris |
| ISBN13 | 9783540616726 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 616 |
| Izmēri | 140 × 216 × 39 mm · 1,12 kg |
| Tulks | Hattori, T. |
| Tulks | Heusler, S. |
| Tulks | Webb, J.P. |
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