Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology - Seongbo Shim - Grāmatas - Springer International Publishing AG - 9783319762937 - 2018. gada 3. aprīlis
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology 2018 edition

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.


138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.

Mediji Grāmatas     Hardcover Book   (Grāmata ar cieto muguriņu un vāku)
Izlaists 2018. gada 3. aprīlis
ISBN13 9783319762937
Izdevēji Springer International Publishing AG
Lapas 138
Izmēri 150 × 220 × 20 mm   ·   394 g
Valoda Vācu  

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