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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology Seongbo Shim Softcover Reprint of the Original 1st 2018 edition
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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography - NanoScience and Technology
Seongbo Shim
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.
138 pages, 40 Tables, color; 54 Illustrations, color; 38 Illustrations, black and white; XIV, 138 p.
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2019. gada 8. februāris |
| ISBN13 | 9783030094553 |
| Izdevēji | Springer Nature Switzerland AG |
| Lapas | 138 |
| Izmēri | 154 × 234 × 12 mm · 246 g |
| Valoda | Vācu |
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