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Design for Manufacturability with Advanced Lithography Bei Yu Softcover reprint of the original 1st ed. 2016 edition
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 35 Tables, black and white; XI, 164 p.
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2016. gada 23. augusts |
| ISBN13 | 9783319373935 |
| Izdevēji | Springer International Publishing AG |
| Lapas | 164 |
| Izmēri | 150 × 220 × 10 mm · 258 g |
| Valoda | Vācu |
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