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Design for Manufacturability with Advanced Lithography Bei Yu 1st ed. 2016 edition
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Design for Manufacturability with Advanced Lithography
Bei Yu
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
164 pages, 9 black & white illustrations, 91 colour illustrations, 35 black & white tables, biograph
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2015. gada 23. novembris |
| ISBN13 | 9783319203843 |
| Izdevēji | Springer International Publishing AG |
| Lapas | 164 |
| Izmēri | 155 × 235 × 11 mm · 426 g |
| Valoda | Franču |
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