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Flash Lamp Annealing: From Basics to Applications - Springer Series in Materials Science Lars Rebohle 2019 edition
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Flash Lamp Annealing: From Basics to Applications - Springer Series in Materials Science
Lars Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
288 pages, 10 Tables, color; XVIII, 288 p.
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2020. gada 14. augusts |
| ISBN13 | 9783030233013 |
| Izdevēji | Springer Nature Switzerland AG |
| Lapas | 288 |
| Izmēri | 155 × 232 × 20 mm · 466 g |
| Valoda | Vācu |
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