Plasma Charging Damage - Kin P. Cheung - Books - Springer London Ltd - 9781852331443 - October 4, 2000
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Kin P. Cheung
Plasma Charging Damage 2001 edition

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

346 pages, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released October 4, 2000
ISBN13 9781852331443
Publishers Springer London Ltd
Pages 346
Dimensions 155 × 235 × 20 mm   ·   657 g
Language English  

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