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Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties John T. Milek Softcover reprint of the original 1st ed. 1971 edition
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Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties
John T. Milek
2 References 4 Methods of Preparation * 5 Introduction * 5 Direct Nitridation Method 8 Evaporation Method * 9 Glow Discharge Method.
118 pages, 2 black & white illustrations
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2013. gada 21. janvāris |
| Oriģinālā izdošanas datums | 1971 |
| ISBN13 | 9781468461640 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 118 |
| Izmēri | 210 × 279 × 6 mm · 303 g |
| Valoda | Angļu |
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