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Atomic Layer Deposition for Semiconductors Cheol Seong Hwang 2014 edition
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Atomic Layer Deposition for Semiconductors
Cheol Seong Hwang
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
300 pages, 89 black & white illustrations, 81 colour illustrations, 3 black & white tables, 1 colour
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2013. gada 19. oktobris |
| ISBN13 | 9781461480532 |
| Izdevēji | Springer-Verlag New York Inc. |
| Lapas | 263 |
| Izmēri | 155 × 235 × 20 mm · 521 g |
| Valoda | Angļu |
| Redaktors | Hwang, Cheol Seong |
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