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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings B J Pawlak
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Doping Engineering for Front-End Processing: Volume 1070 - MRS Proceedings
B J Pawlak
The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
336 pages, black & white illustrations
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2014. gada 5. jūnijs |
| ISBN13 | 9781107408548 |
| Izdevēji | Cambridge University Press |
| Lapas | 336 |
| Izmēri | 152 × 229 × 18 mm · 533 g (Svars (aptuveni)) |
| Valoda | Angļu |
| Redaktors | Law, M. (University of Florida) |
| Redaktors | Pawlak, B. J. |
| Redaktors | Pelaz, M. L. (Universidad de Valladolid, Spain) |
| Redaktors | Surugo, K. |
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