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Tribology In Chemical-Mechanical Planarization Hong Liang 1. izdevums
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Tribology In Chemical-Mechanical Planarization
Hong Liang
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization technology. This book offers an examination of tribological principles and their applications in CMP, including integrated circuits and basic concepts in surfaces of contacts.
200 pages, 148 black & white illustrations, 10 black & white tables, 27 black & white halftones
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2005. gada 1. marts |
| ISBN13 | 9780824725679 |
| Izdevēji | Taylor & Francis Inc |
| Lapas | 200 |
| Izmēri | 156 × 234 × 16 mm · 468 g |
| Valoda | Angļu |
