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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE) Singh
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Metrology, Inspection, and Process Control for Microlithography: XIII (Proceedings of SPIE)
Singh
1052 pages, illustrations
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 1999. gada 30. jūnijs |
| ISBN13 | 9780819431516 |
| Izdevēji | SPIE Press |
| Lapas | 1052 |
| Izmēri | 150 × 220 × 10 mm · 1,74 kg (Svars (aptuveni)) |
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