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Silicon-on-Insulator Technology: Materials to VLSI - The Springer International Series in Engineering and Computer Science J.-P. Colinge 1991 edition
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Silicon-on-Insulator Technology: Materials to VLSI - The Springer International Series in Engineering and Computer Science
J.-P. Colinge
Explains the principles and the physics of SOI materials fabrication and characterization, SOI processing SOI MOSFET device physics, and the use of SOI material in novel device design. The performances of SOI circuits for VLSI/ULSI and for niche applications are also described.
228 pages, biography
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