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Silicon-on-Insulator Technology: Materials to VLSI J.-P. Colinge 2nd ed. 1997 edition
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Silicon-on-Insulator Technology: Materials to VLSI
J.-P. Colinge
Silicon-on-Insulator Technology: Materials to VLSI, 2nd Edition describes the different facets of SOI technology. SOI fabrication and characterization techniques, SOI device processing, the physics of the SOI MOSFET as well as that of SOI other devices, and the performances of SOI circuits are discussed in detail.
272 pages, biography
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