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Fundamental Principles of Optical Lithography: The Science of Microfabrication Mack, Chris (Lithoguru.com)
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2008. gada 15. janvāris |
| ISBN13 | 9780470018934 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 544 |
| Izmēri | 171 × 249 × 37 mm · 1,14 kg |
| Valoda | Angļu |
