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Fundamental Principles of Optical Lithography: The Science of Microfabrication Mack, Chris (Lithoguru.com)
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2007. gada 16. novembris |
| ISBN13 | 9780470727300 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 544 |
| Izmēri | 247 × 174 × 29 mm · 892 g |
| Valoda | Angļu |
