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Extreme Ultraviolet Lithography Banqiu Wu Ed Edition
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Extreme Ultraviolet Lithography
Banqiu Wu
Explains the most promising innovation in microlithography today
482 pages, black & white illustrations, black & white tables, figures
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2009. gada 16. maijs |
| ISBN13 | 9780071549189 |
| Izdevēji | McGraw-Hill Education - Europe |
| Lapas | 482 |
| Izmēri | 160 × 239 × 30 mm · 784 g |
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