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Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics Pilar Gonzalez Ruiz Softcover reprint of the original 1st ed. 2014 edition
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Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics
Pilar Gonzalez Ruiz
Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 ?m Cu-backend CMOS.
199 pages, 144 Illustrations, color; XVI, 199 p. 144 illus. in color.
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2015. gada 8. augusts |
| ISBN13 | 9789401781404 |
| Izdevēji | Springer |
| Žanrs | Aspects (Academic) > Science / Technology Aspects |
| Lapas | 199 |
| Izmēri | 155 × 235 × 12 mm · 308 g |
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