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Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen Softcover reprint of the original 1st ed. 2015 edition
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Micro and Nano Fabrication: Tools and Processes
Hans H. Gatzen
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
545 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2016. gada 6. oktobris |
| ISBN13 | 9783662508268 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 519 |
| Izmēri | 155 × 235 × 28 mm · 757 g |
| Valoda | Franču |
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