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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses Janusz Bogdanowicz 2012 edition
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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses
Janusz Bogdanowicz
Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology.
220 pages, 51 black & white illustrations, 23 colour illustrations, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2012. gada 28. jūnijs |
| ISBN13 | 9783642301070 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 204 |
| Izmēri | 155 × 235 × 18 mm · 453 g |
| Valoda | Franču |
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