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Design and Manufacturing of Active Microsystems - Microtechnology and MEMS Stephanus Buttgenbach 2011 edition
Design and Manufacturing of Active Microsystems - Microtechnology and MEMS
Stephanus Buttgenbach
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
444 pages, biography
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2014. gada 21. marts |
| Oriģinālā izdošanas datums | 2013 |
| ISBN13 | 9783642267383 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 444 |
| Izmēri | 155 × 235 × 24 mm · 635 g |
| Valoda | Vācu |
| Redaktors | Burisch, Arne |
| Redaktors | Buttgenbach, Stephanus |
| Redaktors | Hesselbach, Jurgen |
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