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Low Pressure Plasmas and Microstructuring Technology Gerhard Franz 2009 edition
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Low Pressure Plasmas and Microstructuring Technology
Gerhard Franz
Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching.
732 pages, 1, black & white illustrations
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2009. gada 30. aprīlis |
| ISBN13 | 9783540858485 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 732 |
| Izmēri | 155 × 235 × 39 mm · 1,23 kg |
| Valoda | Angļu |
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