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Reactive Sputter Deposition - Springer Series in Materials Science D Depla 2008 edition
Reactive Sputter Deposition - Springer Series in Materials Science
D Depla
In the family of Physical Vapour Deposition techniques, sputtering is one of the most important. This book describes various aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth allowing the reader to understand the complete process.
590 pages, 336 black & white illustrations, 5 colour illustrations, 37 black & white tables
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2008. gada 24. aprīlis |
| ISBN13 | 9783540766629 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 572 |
| Izmēri | 162 × 241 × 45 mm · 1,13 kg |
| Valoda | Vācu |
| Redaktors | Depla, Diederik |
| Redaktors | Mahieu, Stijn |