Pastāsti draugiem par šo preci:
CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS D. Lange 2002 edition
CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications - Microtechnology and MEMS
D. Lange
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.
142 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2002. gada 23. jūlijs |
| ISBN13 | 9783540431435 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 142 |
| Izmēri | 166 × 243 × 14 mm · 340 g |
| Valoda | Angļu |