Pastāsti draugiem par šo preci:
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales Jianfeng Luo 2004 edition
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales
Jianfeng Luo
Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example.
311 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2004. gada 7. oktobris |
| ISBN13 | 9783540223696 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 311 |
| Izmēri | 155 × 235 × 20 mm · 653 g |
| Valoda | Angļu Vācu |
Ziemassvētku dāvanas var atgriezt līdz 31. janvārim