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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS Hiroyuki Fujita 2003 edition
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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS
Hiroyuki Fujita
Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.
211 pages, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2003. gada 11. jūlijs |
| ISBN13 | 9783540008569 |
| Izdevēji | Springer-Verlag Berlin and Heidelberg Gm |
| Lapas | 211 |
| Izmēri | 155 × 235 × 14 mm · 489 g |
| Valoda | Vācu |
| Redaktors | Fujita, Hiroyuki |
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