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Dry Etching Technology for Semiconductors Kazuo Nojiri 2015 edition
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Dry Etching Technology for Semiconductors
Kazuo Nojiri
Dry Etching Technology for Semiconductors
116 pages, 123 black & white illustrations, 5 black & white tables, biography
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2014. gada 3. novembris |
| ISBN13 | 9783319102948 |
| Izdevēji | Springer International Publishing AG |
| Lapas | 116 |
| Izmēri | 165 × 242 × 12 mm · 362 g |
| Valoda | Angļu Japāņu |
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