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Advanced MEMS / NEMS Fabrication and Sensors 2022 edition
Advanced MEMS / NEMS Fabrication and Sensors
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
312 pages, 75 Tables, color; 157 Illustrations, color; 10 Illustrations, black and white; VI, 312 p.
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2021. gada 13. oktobris |
| ISBN13 | 9783030797485 |
| Izdevēji | Springer Nature Switzerland AG |
| Lapas | 312 |
| Izmēri | 150 × 220 × 20 mm · 705 g |
| Valoda | Vācu |
| Redaktors | Yang, Zhuoqing |
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