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Molecular Theory of Lithography - Press Monographs Uzodinma Okoroanyanwu
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Molecular Theory of Lithography - Press Monographs
Uzodinma Okoroanyanwu
Offers a unified exposition of the molecular theory that underlies lithographic imaging. The text explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms.
488 pages
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2015. gada 30. decembris |
| ISBN13 | 9781628415513 |
| Izdevēji | SPIE Press |
| Lapas | 488 |
| Izmēri | 150 × 220 × 20 mm · 1,21 kg |
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