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Mems Mechanical Sensors Steve P. Beeby
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Mems Mechanical Sensors
Steve P. Beeby
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
284 pages, 1, black & white illustrations
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2004. gada 30. aprīlis |
| ISBN13 | 9781580535366 |
| Izdevēji | Artech House Publishers |
| Lapas | 284 |
| Izmēri | 184 × 256 × 23 mm · 644 g |
| Valoda | Angļu |
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