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Photon Sources for Lithography and Metrology - Press Monographs Vivek Bakshi
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Photon Sources for Lithography and Metrology - Press Monographs
Vivek Bakshi
Photon sources enable the extension of lithography and metrology technologies forcontinued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This volume is the authoritative reference on photon source technology and includes contributions from leading researchers and suppliers in the field.
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2023. gada 31. oktobris |
| ISBN13 | 9781510653719 |
| Izdevēji | SPIE Press |
| Lapas | 1320 |
| Izmēri | 266 × 187 × 53 mm · 2,26 kg |
| Redaktors | Bakshi, Vivek |
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