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Microlithography: Science and Technology Bruce W. Smith 3. izdevums
Microlithography: Science and Technology
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2020. gada 20. maijs |
| ISBN13 | 9781439876756 |
| Izdevēji | Taylor & Francis Inc |
| Lapas | 838 |
| Izmēri | 150 × 220 × 20 mm · 1,62 kg |
| Valoda | Angļu |
| Redaktors | Smith, Bruce W. |
| Redaktors | Suzuki, Kazuaki |