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Microlithography: Science and Technology Bruce W. Smith-Kazuaki Suzuki 3. izdevums
Microlithography: Science and Technology
Bruce W. Smith-Kazuaki Suzuki
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
838 pages, 570 Illustrations, black and white
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2024. gada 24. jūnijs |
| ISBN13 | 9781032836737 |
| Izdevēji | Taylor & Francis Ltd |
| Lapas | 850 |
| Izmēri | 181 × 256 × 46 mm · 1,52 kg |
| Redaktors | Smith, Bruce W. (Rochester Institute of Technology, New York, USA) |
| Redaktors | Suzuki, Kazuaki (Nikon Corporation, Tokyo, Japan) |