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An Introduction to Microelectromechanical Systems Engineering Nadim Maluf First Printing edition
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An Introduction to Microelectromechanical Systems Engineering
Nadim Maluf
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1999. gada 30. novembris |
| ISBN13 | 9780890065815 |
| Izdevēji | Artech House Print on Demand |
| Lapas | 265 |
| Izmēri | 158 × 24 × 232 mm · 644 g |
| Valoda | Angļu |
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