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X-Ray Metrology in Semiconductor Manufacturing Bowen, D. Keith (Bede Plc, Durham, UK) 1. izdevums
X-Ray Metrology in Semiconductor Manufacturing
Bowen, D. Keith (Bede Plc, Durham, UK)
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.
296 pages, 152 black & white illustrations, 14 black & white tables, 50 black & white halftones
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2006. gada 24. janvāris |
| ISBN13 | 9780849339288 |
| Izdevēji | Taylor & Francis Inc |
| Lapas | 296 |
| Izmēri | 162 × 245 × 21 mm · 586 g |
| Valoda | Angļu |