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Run-to-Run Control in Semiconductor Manufacturing Duane S. Boning 1. izdevums
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Run-to-Run Control in Semiconductor Manufacturing
Duane S. Boning
Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
368 pages, 27 black & white tables
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2000. gada 30. novembris |
| ISBN13 | 9780849311789 |
| Izdevēji | Taylor & Francis Inc |
| Lapas | 366 |
| Izmēri | 158 × 242 × 22 mm · 630 g |
| Valoda | Angļu |
| Redaktors | Del Castillo, Enrique (Pennsylvania State University, University Park, Usa) |
| Redaktors | Hurwitz, Arnon M. (Friendswood, Texas, USA) |
| Redaktors | Moyne, James (University of Michigan, Ann Arbor, USA) |
