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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE) Herr
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Metrology, Inspection and Process Control for Microlithography XVII (Proceedings of SPIE)
Herr
1296 pages
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2003. gada 30. jūnijs |
| ISBN13 | 9780819448439 |
| Izdevēji | SPIE Press |
| Lapas | 1296 |
| Izmēri | 150 × 220 × 10 mm · 2,14 kg (Svars (aptuveni)) |
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