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Electron-Beam X-Ray Euv and Ion-Beam Submicrometer Lithographies For Manufacturing Vi- Seeger
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Electron-Beam X-Ray Euv and Ion-Beam Submicrometer Lithographies For Manufacturing Vi-
Seeger
420 pages
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 1997. gada 31. maijs |
| ISBN13 | 9780819420992 |
| Izdevēji | SPIE Press |
| Lapas | 420 |
| Izmēri | 150 × 220 × 10 mm · 697 g (Svars (aptuveni)) |
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